Electronic card with protection against aerial discharge

ABSTRACT

A semiconductor integrated circuit device includes a semiconductor region of a first conductivity type. A first insulated-gate field effect transistor having a source/drain region of a second conductivity type connected to an output terminal is formed on the semiconductor region. Further, a semiconductor region of a second conductivity type connected to the gate of the transistor is formed adjacent to the source/drain region of the transistor on the semiconductor region.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.10/722,598, filed Nov. 28, 2003 now U.S. Pat. No. 6,952,027) and isbased upon and claims the benefit of priority from the prior JapanesePatent Application No. 2002-348935, filed Nov. 29, 2002, the entirecontents of each of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a semiconductor integrated circuit device andan electronic card using the same and more particularly to acountermeasure against destruction caused by charging and dischargingoperations with respect to the semiconductor integrated circuit deviceitself.

2. Description of the Related Art

A semiconductor integrated circuit device has a protection circuit andprotection function to protect it from an excessively large currentsupplied to an output terminal thereof. The test standard is defined byMIL (Military Standards) and EIAJ (Electronic Industries Association ofJapan).

A semiconductor integrated circuit device is not used in a singular formand, in general, it is incorporated into an electronic product and used.Therefore, it is considered that the semiconductor integrated circuitdevice is normally connected to a ground node or power source in themarket. In the test standards defined by MIL and EIAJ, a needle isbrought into contact with the output terminal to cause an excessivelylarge current to flow into the semiconductor integrated circuit devicefor a period of time of several tens of nanoseconds to severalmicroseconds. During the test, the semiconductor integrated circuitdevice is set in a state in which it is connected to the ground node orpower source. In this state, the protection circuit and protectionfunction cause the excessively large current in the semiconductorintegrated circuit device to leak into the ground node or power source,thus protecting the integrated circuit. As a result, the semiconductorintegrated circuit device becomes difficult to be destroyed even if anexcessively large current is inadvertently supplied thereto. Thus, thereliability and durability of the electronic product in which thesemiconductor integrated circuit device is incorporated are enhanced.

In recent years, the application range of semiconductor integratedcircuit devices covers not only electronic products but also variousmedia such as recording media and information media. Conventionalrecording media and information media are magnetic cards and magneticdisks that magnetically store information. The magnetic storing devicereplace by a nonvolatile semiconductor memory device. Thus, theinformation storage amount, information holding characteristics, thedegree of information secrecy and the like can be enhanced in comparisonwith magnetic cards and magnetic disks. Examples of the recording mediaare called memory cards or IC cards and are widely available on themarket. As document which discloses a memory card, for example, document1 is given. In this specification, all of the recording media andinformation media utilizing semiconductor integrated circuit devices arecalled electronic cards.

Document 1: Shigeo Araki, “The Memory Stick”, the web site <hyperlinksymbology omitted> pp. 40–46

Like the magnetic card and magnetic disk, the electronic card is notalways used while it is incorporated in the electronic product. A personcarries the electronic card. That is, the semiconductor integratedcircuit device in the electronic card is most frequently set in a statein which it is not electrically connected to the ground node or powersource. Further, the conventional protection circuit and protectionfunction cause an excessively large current to leak into the ground nodeor power source. Therefore, if the semiconductor integrated circuitdevice is placed in a severe environment while it is connected toneither the ground node nor the power source, there occurs a possibilitythat the integrated circuit cannot be fully protected by use of aconventional protection circuit and protection function.

BRIEF SUMMARY OF THE INVENTION

An electronic card according to an aspect of the present inventionincludes a card terminal which is exposed on a surface of a card, asemiconductor integrated circuit chip including an insulated-gate fieldeffect transistor, and a protection circuit which is provided betweenthe card terminal and the insulated-gate field effect transistor, theprotection circuit configured to protect the insulated-gate field effecttransistor from destruction against a pulse having a pulse width of insor less applied to the card terminal.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

FIGS. 1A and 1B are views for illustrating one example of an unexpectedsituation;

FIGS. 2A and 2B are views for illustrating another example of anunexpected situation;

FIG. 3A is a diagram showing the relation between a current I and time tin a case where a needle is brought into contact with an outputterminal;

FIG. 3B is a diagram showing the relation between voltage V and time tin a case where an aerial discharge occurs;

FIGS. 4A and 4B are circuit diagrams showing a semiconductor integratedcircuit device according to a reference example of the presentinvention;

FIG. 5A is a circuit diagram showing a semiconductor integrated circuitdevice according to a reference example of the present invention;

FIG. 5B is a cross-sectional view schematically showing thesemiconductor integrated circuit device of FIG. 5A;

FIG. 6A is a circuit diagram showing a semiconductor integrated circuitdevice according to a first embodiment of the present invention;

FIG. 6B is a plan view showing one example of a plane pattern of thesemiconductor integrated circuit device of FIG. 6A;

FIGS. 7A and 7B are a diagram and view for illustrating one example ofthe protection operation of the semiconductor integrated circuit deviceaccording to the first embodiment of the present invention;

FIGS. 8A and 8B are a diagram and view for illustrating another exampleof the protection operation of the semiconductor integrated circuitdevice according to the first embodiment of the present invention;

FIG. 9 is a circuit diagram showing a semiconductor integrated circuitdevice according to a second embodiment of the present invention;

FIG. 10 is a circuit diagram showing a semiconductor integrated circuitdevice according to a third embodiment of the present invention;

FIG. 11 is a plan view showing a first layout example of a semiconductorintegrated circuit device according to a fourth embodiment of thepresent invention;

FIG. 12 is a sectional view taken along the line 12—12 in FIG. 11;

FIG. 13 is a sectional view taken along the line 13—13 in FIG. 11;

FIG. 14 is a plan view showing a state, in which a first-layered metalfilm and a second-layered metal film from a plan view shown in FIG. 11;

FIG. 15 is a plan view showing a state, in which the second-layeredmetal film is removed from the plan view shown in FIG. 12;

FIG. 16 is a plan view showing a second layout example of thesemiconductor integrated circuit device according to the fourthembodiment of the present invention;

FIG. 17 is a sectional view taken along the line 17—17 in FIG. 16;

FIG. 18 is a plan view showing a state, in which the first-layered metalfilm and the second-layered metal film have been removed from the planview shown in FIG. 16;

FIG. 19 is a plan view showing a state, in which the second-layeredmetal film has been removed from the plan view shown in FIG. 16;

FIG. 20 is a plan view showing a third layer example of thesemiconductor integrated circuit device according to the fourthembodiment of the present invention;

FIG. 21 is a plan view showing a state, in which the second-layeredmetal film has been removed from the plan view shown in FIG. 20;

FIG. 22 is an equivalent circuit diagram showing an equivalent circuitof a third layout example;

FIG. 23 is a view showing a relationship between a fuseconnection/disconnection state; and a protection capability and acurrent driving capability;

FIG. 24 is a plan view showing a first example of disconnection;

FIG. 25 is a plan view showing a second example of disconnection;

FIG. 26 is a plan view showing a third example of disconnection;

FIG. 27 is a plan view showing a fourth example of disconnection;

FIG. 28 is a plan view showing a fifth example of disconnection;

FIG. 29 is a plan view showing an example of connection;

FIG. 30 is a view showing a basic layout of the third layout example ofthe semiconductor integrated circuit device according to the fourthembodiment of the present invention;

FIG. 31 is a view showing a basic layout of a fourth layout example ofthe semiconductor integrated circuit device according to the fourthembodiment of the present invention;

FIG. 32 is a plan view showing a basic layer of the fourth layoutexample of the semiconductor integrated circuit device according to thefourth embodiment of the present invention;

FIG. 33 is a plan view showing a state, in which the second-layeredmetal film has been removed from the plan view shown in FIG. 32;

FIG. 34 is an equivalent circuit diagram showing an equivalent circuitof the fourth layout example;

FIG. 35 is a view showing a relationship between a state of a fuseconnection/disconnection; and a protection capability and a currentdriving capability,

FIG. 36 is a plan view showing a first example of disconnection;

FIG. 37 is a plan view showing a second example of disconnection;

FIG. 38 is a plan view showing a third example of disconnection;

FIG. 39 is a plan view showing a fourth example of disconnection;

FIG. 40 is a plan view showing a fifth example of disconnection;

FIG. 41 is a plan view showing an example of connection;

FIG. 42A is a perspective view showing an example of a charge test;

FIG. 42B is a perspective view showing an example of a discharge test;

FIG. 43A is a block diagram depicting an example of a NAND type EEPROM;

FIG. 43B is a circuit diagram showing an example of a memory cell arrayin the NAND type EEPROM;

FIG. 44 is a block diagram depicting a first example of a memory card;

FIG. 45 is a block diagram depicting a second example of a memory card;

FIG. 46 is a block diagram depicting a third example of a memory card;

FIG. 47 is an exploded sectional view showing a fourth example of amemory card;

FIG. 48 is an exploded sectional view showing a fifth example of amemory card;

FIG. 49 is an exploded sectional view showing a sixth example of amemory card;

FIG. 50 is a perspective view showing an example of electronic equipmentutilizing an IC card according to one embodiment of the presentinvention;

FIG. 51 is a block diagram showing a basic system of a digital stillcamera;

FIGS. 52A to 52F are views showing other examples of an electronicequipment utilizing an IC card according to embodiments of the presentinvention; and

FIGS. 53A to 53F are views showing other examples of electronicequipment utilizing an IC card according to embodiments of the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

There will now be described embodiments of this invention with referenceto the accompanying drawings. In the following explanation, likereference symbols are attached to common portions throughout the wholedrawings.

Before explaining the embodiments, an unexpected situation which mayoccur while a semiconductor integrated circuit device is connected toneither a ground node nor a power source is explained.

FIGS. 1A and 1B are views for illustrating one example of an unexpectedsituation.

As shown in FIG. 1A, an electronic card 1 is placed on a groundedconductor. A semiconductor integrated circuit device chip 2 in theelectronic card 1 is connected to neither a ground node nor a powersource. Assume that a “positively” charged body, for example, afingertip is set close to the electronic card 1 in this state. When thedistance between the fingertip and the electronic card 1 becomes acertain distance, an aerial discharge occurs between the fingertip andthe electronic card 1 as shown in FIG. 1B. As a result, the electroniccard 1 or chip 2 is positively charged.

FIGS. 2A and 2B are views for illustrating another example of anunexpected situation.

As shown in FIG. 2A, assume that the electronic card 1 is “positively”charged, for example. Further, assume that the electronic card 1 isdropped on a grounded conductor, for example. As in the case of FIGS. 1Aand 1B, the chip 2 in the electronic card 1 is connected to neither theground node nor the power source. Also, in this case, when the distancebetween the electronic card 1 and the grounded conductor becomes acertain distance, an aerial discharge occurs between the electronic card1 and the grounded conductor. As a result, the electronic card 1 isdischarged conversely to the case shown in FIGS. 1A and 1B.

A limitation is put on the protection of the integrated circuit by useof a protection circuit or protection function which causes anexcessively large current to leak into the ground node or power sourceif the electronic card 1 is connected to neither the ground node nor thepower source. For example, in the test standards defined by MIL andEIAJ, a needle is brought into contact with the output terminal topermit an excessively large current to flow into the semiconductorintegrated circuit device for a period of time of several tens ofnanoseconds to several microseconds. In order to meet the abovestandard, the protection circuit or protection function causes theexcessively large current to leak into the ground node or power sourcefor a period of time of several tens of nanoseconds to severalmicroseconds. FIG. 3A shows the relation between a current I and time tin a case where a needle is brought into contact with the outputterminal.

In the above state, excessively high voltage is applied to theelectronic card 1 and/or chip 2 while the chip 2 is connected to neitherthe ground node nor the power source. As a result, an aerial dischargeoccurs between the electronic card 1 and/or chip 2 and the charged bodyor ground node. It is considered that the aerial discharge terminates inseveral nanoseconds or less and generally 1 nanoseconds or less and thetime of the aerial discharge is extremely shorter than the test timedefined by MIL or EIAJ. Further, the voltage is extremely higher thanthat obtained in a case wherein the excessively large current flows.FIG. 3B shows the relation between voltage V and time t in a case wherethe gaseous discharge occurs. In FIG. 3B, the relation between voltage Vand time t in a case where the needle is brought into contact with theoutput terminal is shown by use of broken lines for comparison with theabove case. The unexpected situation is difficult to overcome only byuse of a protection circuit and protection function which satisfies thetest standard of MIK or EIAJ.

FIGS. 4A and 4B are circuit diagrams showing a semiconductor integratedcircuit device according to a reference example of the presentinvention.

FIGS. 4A and 4B show a portion of the output circuit of the chip 2 andshow the state in which the chip 2 is connected to a ground node GND andpower source VCC. The output circuit protects the integrated circuit inthe following manner when an excessively large current flows in anoutput terminal PAD.

As shown in FIG. 4A, a needle 17 to which positive potential is appliedis brought into contact with the output terminal PAD. Thus, anexcessively large current I is caused to flow towards the drain D of anN-channel MOSFET N1 and the drain D of a P-channel MOSFET P1 of theoutput circuit. In this case, the PN junction between the drain D of thetransistor P1 and an N-type well (or an N-type semiconductor substrate)in which the drain D is formed, is forwardly biased. The excessivelylarge current I flows into the power source VCC.

On the other hand, the needle 17 to which negative potential is appliedis brought into contact with the output terminal PAD. In this case, asshown in FIG. 4B, the PN junction between the drain D of the transistorN1 and an N-type semiconductor substrate (or an N-type well) in whichthe drain D is formed is forwardly biased. The excessively large currentI flows from the ground node GND into the output terminal PAD.

Thus, the semiconductor integrated circuit device according to thereference example satisfies the test standards of MIL and EIAJ andprotects the integrated circuit from the excessively large current I.

However, the inventor of this application has detected that thefollowing destruction mode occurs when the chip 2 is connected toneither the ground node GND nor the power source VCC as shown in FIGS.5A and 5B.

Assume that the chip 2 is positively charged for some reason as shown inFIGS. 5A and 5B. A grounded needle 17 is set close to the outputterminal PAD of the positively charged chip 2. Then, an aerial dischargeoccurs between the output terminal PAD and the needle 17 (1). Therefore,the potential of the drain D of the transistor N1 is lowered and theP-type semiconductor substrate Psub is forwardly biased so as to permita current to flow between the drain D and the semiconductor substrate.As a result, the potential of a portion of the substrate around thedrain D is lowered (2). A lowering in the potential is spread in theinternal portion of the substrate via a wiring (ground line GND)connected to the ground node GND (3). This is because the ground lineGND has resistance RGND. The lowering in the potential soon reaches adrive circuit which drives the transistor N1. The drive circuit includesan N-channel MOS transistor N2. When the lowering in the potential hasreached a portion around the drain D of the transistor N2, a portionbetween the drain D and the P-type semiconductor substrate is brokendown (4). The gate of the transistor N1 is discharged and the gatepotential of the transistor N1 is lowered (5).

At this time, time delay occurs between a lowering in the potential ofthe drain D of the transistor N1 and a lowering in the potential of thegate thereof. This is because the ground line GND has resistance RGNDand the wiring which connects the drain of the transistor N2 to the gateof the transistor N1 has resistance RN. Therefore, a lowering in thegate potential is delayed and a potential difference A temporarilyoccurs between the drain D and gate G of the transistor N1 as shown inFIG. 5B. It is required for the gate insulating film of the transistorN1 to withstand the potential difference A. However, it is predictedthat the potential difference occurring in the case of aerial dischargewill reach several thousand V and the destruction cannot be avoided.

Thus, when an unexpected situation occurs in a case where the chip 2 isconnected to neither the ground node GND nor the power source VCC, theintegrated circuit is destroyed.

Next, a semiconductor integrated circuit device which can overcome theunexpected situation is explained as first to fourth embodiments of thepresent invention.

(First Embodiment)

FIG. 6A is a circuit diagram showing a semiconductor integrated circuitdevice according to a first embodiment of the present invention.

As shown in FIG. 6A, the semiconductor integrated circuit deviceaccording to the first embodiment is an output circuit. The outputcircuit includes an output buffer 21 which drives an output terminalPAD, and a drive circuit 22 which drives the output buffer 21 based on asignal from an internal portion of an integrated circuit.

The output buffer 21 includes an N-channel insulated-gate field effecttransistor N1 having a drain connected to the output terminal PAD and asource and back-gate coupled to the ground node GND and a P-channelinsulated-gate field effect transistor P1 having a drain connected tothe output terminal PAD and a source and back-gate coupled to the powersource VCC. One example of the insulated-gate field effect transistor isa MOSFET. The gates of the transistors P1 and N1 are connected to thedrive circuit 22.

The drive circuit 22 includes an N-channel insulated-gate field effecttransistor N2 having a drain coupled to the gate of the transistor N1and a source and back-gate coupled to the ground node GND and aP-channel insulated-gate field effect transistor P2 having a draincoupled to the gate of the transistor N1 and a source and back-gatecoupled to the power source VCC. The transistors N2, P2 drive thetransistor N1 of the output buffer 21 based on a signal from an internalintegrated circuit (not shown).

Further, the drive circuit 22 includes an N-channel insulated-gate fieldeffect transistor N3 having a drain coupled to the gate of thetransistor P1 and a source and back-gate coupled to the ground node GNDand a P-channel insulated-gate field effect transistor P3 having a draincoupled to the gate of the transistor P2 and a source and back-gatecoupled to the power source VCC. Like the transistors N2, P2, thetransistors N3, and P3 drive the transistor P1 of the output buffer 21based on a signal from an internal integrated circuit (not shown).

The output circuit according to the present embodiment includes a diodeDN having a cathode connected to the gate of the transistor N1 and ananode coupled to the ground node GND and a diode DP having an anodeconnected to the gate of the transistor P1 and a cathode coupled to thepower source VCC. The cathode of the diode DN is formed adjacent to thedrain of the transistor N1 and the anode of the diode DP is formedadjacent to the drain of the transistor P2. One example of the patternplane is shown in FIG. 6B.

As shown in FIG. 6B, in the plane pattern of one example, thetransistors N1, P1 and output terminal PAD are arranged in an areabetween the ground line GND and the power source line VCC. For example,the ground line GND and the power source line VCC are formed of asecond-layered metal film. The output terminal PAD is arranged betweenthe transistors N1 and P1. For example, the cathode of the diode DN isformed in a portion of the P-type semiconductor substrate Psub whichlies below the ground line GND and connected to the gate of thetransistor N1 via a first-layered metal film which lies closer to thesubstrate side than the second-layered metal film. Likewise, forexample, the anode of the diode DP is formed in a portion of the N-typewell N-well which lies below the power source line VCC and connected tothe gate of the transistor P1 via the first-layered metal film. Althoughnot shown in the drawing, the transistors N2, P2, N3, P3 are arranged inan area other than the area in which the transistors N1, P1 arearranged. Therefore, the distance from the drain of the transistor N1 tothe cathode of the diode DN is shorter than the distance from the drainof the transistor N1 to the drain of the transistor N2. Likewise, thedistance from the drain of the transistor P1 to the anode of the diodeDP is shorter than the distance from the drain of the transistor P1 tothe drain of the transistor P3.

The unexpected situation can be overcome by providing the diodes DN, DP.This is explained in detail below.

FIGS. 7A and 7B are a diagram and view for illustrating one example ofthe protection operation of the semiconductor integrated circuit deviceaccording to the first embodiment of the present invention. In thisexample, it is assumed that the chip 2 is positively charged.

As shown in FIGS. 7A and 7B, the grounded needle 17 is set closer to theoutput terminal PAD of the positively charged chip 2 to cause an aerialdischarge between the output terminal PAD and the needle 17 (1). Then,the potential of the drain D of the transistor N1 is lowered, the drainD and the P-type semiconductor substrate Psub are forwardly biased, acurrent flows between the drain D and the P-type semiconductor substrateand potential of a portion of the substrate around the drain D islowered (2). A diode DN having a substrate Psub used as an anode and anN-type semiconductor region N+ formed adjacent to the drain D and usedas a cathode is broken down when a lowering in the substrate potentialoccurs (3). As a result, the gate potential of the transistor N1 islowered. The breakdown occurs after reverse voltage in a reversedirection of the diode DN, generally a potential difference ofapproximately 15 V has occurred. However, as described above, voltagecaused by the aerial discharge reaches several thousand V. Therefore,the breakdown occurs instantaneously. Further, since the cathode isformed adjacent to the drain of the transistor N1, the distance from thetransistor N1 to the cathode is sufficiently short. Therefore, a timedifference between the lowering in the potential of the drain of thetransistor N1 and the lowering in the potential of the gate thereof canbe made smaller in comparison with that of the reference example. As aresult, it can be considered that the potential difference does notsubstantially occur between the drain D and gate G of the transistor N1.Therefore, even when an aerial discharge occurs with respect to the chip2 in a state in which the chip 2 is connected to neither the ground nodeGND nor the power source VCC, the gate insulating film of the transistorN1 is not destroyed. Thus, the integrated circuit can be protected.

FIGS. 8A and 8B are a diagram and view for illustrating another exampleof the protection operation of the semiconductor integrated circuitdevice according to the first embodiment of the present invention. Inthis example, it is assumed that a positively charged body is set closerto the chip 2.

As shown in FIGS. 8A and 8B, the positively charged needle 17 is setcloser to the output terminal PAD of the chip 2 to cause an aerialdischarge between the output terminal PAD and the needle 17 (1). Then,the potential of the drain D of the transistor P1 rises, the drain D andthe N-type well N-well are forwardly biased, a current flows between thedrain D and the N-type well and potential of a portion of the wellaround the drain D rises (2). A diode DP having the well N-well used asa cathode and a P-type semiconductor region P+ formed adjacent to thedrain D and used as an anode is broken down when the well potentialrises (3). As a result, the gate potential of the transistor P1 israised. Thus, even when an aerial discharge occurs towards the chip 2 ina state in which the chip 2 is connected to neither the ground node GNDnor the power source VCC, the gate insulating film of the transistor P1is not destroyed. Thus, the integrated circuit can be protected by theprotection operation which is a reverse operation of the case of FIGS.7A and 7B.

The test standard of MIL and EIAJ can be satisfied by the sameprotection operation as that of the semiconductor integrated circuitdevice according to the reference example.

In the present embodiment, the PN junction diode is used as the diode,but it is possible to use a diode other than the PN junction diode.

(Second Embodiment)

FIG. 9 is a circuit diagram showing a semiconductor integrated circuitdevice according to a second embodiment of the present invention.

As shown in FIG. 9, the second embodiment is obtained by replacing thediodes DN, DP explained in the first embodiment by insulated-gate fieldeffect transistors NFET, PFET, respectively. For example, an example ofthe insulated-gate field effect transistor is a MOSFET. The mechanism inwhich a chip 2 is charged or discharged by an aerial discharge is thesame as that of the first embodiment. In this example, utilizing thesurface breakdown characteristic of a channel portion of the MOSFET canattain the same effect as that of the first embodiment.

Surface breakdown may occur at a voltage lower than the voltage at whichbreakdown takes place at the PN junction. The second embodiment isadvantageous in that the protection margin relating to the voltage, inparticular, is broader than in the first embodiment.

(Third Embodiment)

FIG. 10 is a circuit diagram showing a semiconductor integrated circuitdevice according to a third embodiment of the present invention.

As shown in FIG. 10, the third embodiment is obtained by replacing thediodes DN, DP explained in the first embodiment by bipolar transistorsQNPN, QPNP, respectively. Also, in the present embodiment, the mechanismin which a chip 2 is charged or discharged by an aerial discharge is thesame as that of the first embodiment. In this example, utilizing thepunch through characteristic of the bipolar transistor can attain thesame effect as that of the first embodiment.

The third embodiment is advantageous in that a large current can flowbecause the bipolar transistor QNPN is turned on and/or the bipolartransistor QPNP are is turned on. The third embodiment is advantageousalso in that the protection margin relating to the current, inparticular, is broader than in the first embodiment.

(Fourth Embodiment)

Now, some of the layout examples of the semiconductor integrated circuitdevice according to the second embodiment will be described as a fourthembodiment together with their structures.

(First Layout Example)

FIG. 11 is a plan view showing a first layout example of a semiconductorintegrated circuit device according to the fourth embodiment of thepresent invention. FIG. 12 is a sectional view taken along the line12—12 in FIG. 11. FIG. 13 is a sectional view taken along the line 13—13in FIG. 11. FIG. 14 is a plan view showing a state in which afirst-layered metal film and a second-layered metal film have beenremoved from the plan view shown in FIG. 11. FIG. 15 is a plan viewshowing a state in which the second-layered metal film has been removedsimilarly.

As shown in FIGS. 11 to 15, an N-type well (N-well) 102 is formed in aP-type semiconductor substrate (P-substrate), for example, in a P-typesilicon substrate 100. An element isolation region 104 formed of asilicon oxide film is formed, for example, in a surface region of theP-type silicon substrate 100 having the N-well 102 formed thereon. Inthis example, the element isolation region 104 separates active regions106 and 108 from each other on the P-type silicon substrate 100, andseparates active regions 110 and 112 from each other on the N-well 102.The active regions 106 and 108 expose a surface of the P-type siliconsubstrate 100, and the active regions 110 and 112 expose a surface ofthe N-well 102. An N-type source/drain diffusion layer 114 of thetransistor N1 described in the second embodiment is formed in the activeregion 106, and a source/drain diffusion layer 116 of the transistor P1is formed in the active layer 110. Similarly, a source/drain diffusionlayer 118 of the transistor NFET described in the second embodiment isformed in the active region 108, and a source/drain diffusion layer 120of the transistor PFET is formed in the active region 112.

A gate insulating film 122 formed of a silicon oxide film, for example,is formed on the active regions 106, 108, 110, and 112, and a gate layer124 is formed on the gate insulating film 122. The gate layer 124 isconstituted of: for example, a layer structure film between anelectrically conductive polysilicon film and a silicide film; a layerstructure film between an electrically conductive polysilicon film and ametal film; or a metal film, of the electrically conductive polysiliconfilm. In this example, the gate layer 124 includes: a gate electrode124-N1 of the transistor N1; a gate electrode 124-P1 of the transistorP1; a gate electrode 124-NFET of the transistor NFET, and a gateelectrode 124-PFET of the transistor PFET. Further, a flat shape of thegate electrode 124-N1 is formed in a U-shape, and the transistor N1 isprovided as a structure including two transistors connected in parallelbetween a power source line VCC and an output terminal PAD. Thetransistor N1 includes the two transistors connected in parallel,whereby a channel width of the transistor N1 is expanded as comparedwith a case in which the transistor N1 is single. By expanding thechannel width, a driving capability required for driving the outputterminal PAD is obtained. The gate electrode 124-P1 also has a flatshape similar to the gate pattern -N1, and a design is made for thetransistor P1 in the same manner as in the transistor N1.

A first-layered interlayer insulating film 126 formed of a silicon oxidefilm, for example, is formed on the P-type silicon substrate 100 havingformed thereon the element isolation region 104, the active regions 106,108, 110, and 112, the gate electrodes 124-N1, 124-P1, 124-NFET, and124-PFET. A first-layered metal film 128 is formed on the first-layeredinterlayer insulating film 126. In this example, the first-layered metalfilm 128 includes a wiring 128-N and a wiring 128-P. The wiring 128-Ntransmits a signal outputted from the transistor N2 or P2 of the drivecircuit 22 to the gate electrode 124-N of the transistor N1, and thewiring 128-P transmits a signal outputted from the transistor N3 or P3of the drive circuit 22 to the gate electrode 124-P of the transistorP1.

The wiring 128-N is connected to the drain of the source/drain diffusionlayer 118 of the transistor NFET via a contact hole or plug 130 formedin the first-layered interlayer insulating film 126. The wiring 128-N isalso connected to the gate electrode 124-N1 of the transistor N1 via acontact hole or plug 132 formed in the first-layered interlayerinsulating film 126. The contact hole or plug 130 is formed at a portionof the wiring 128-N between an output node (not shown) of the drivecircuit 22, a common output node (not shown) of the transistor N2 andtransistor P2 in this example and the contact hole or plug 132. In thismanner, the drain of the transistor NFET is connected between the outputnode of the drive circuit 22 and the gate electrode 124-N1 of thetransistor N1, and the protection effect described in the foregoingembodiment can be obtained.

Similarly, the wiring 128-P is connected to the drain of thesource/drain diffusion layer 120 of the transistor PFET via a contacthole or plug 134 formed in the first-layered interlayer insulating film126. The wiring 128-P is also connected to the gate electrode 124-P1 ofthe transistor P1 via a contact hole or plug 136 formed in thefirst-layered interlayer insulating film 126. The contact hole or plug134 is formed at a portion of the wiring 128-P between an output node(not shown) of the drive circuit 22, a common output node (not shown) ofthe transistor N3 and transistor P3 in this example and the contact holeor plug 136. In this manner, the protection effect described in theforegoing embodiment is obtained.

A second-layered interlayer insulating film 138 formed of a siliconoxide film, for example, is formed on the first-layered interlayerinsulating film 126 having the first-layered metal film 128 formedthereon. A second-layered metal film 140 is formed on the first-layeredinterlayer insulating film 138. In this example, the second-layeredmetal film 140 includes wirings 140-GND, 140-VCC and a wiring 140-PAD.The wiring 140-GND supplies a grounding potential GND to a circuit in asemiconductor integrated circuit device chip, and the wiring 140-VCCsupplies a power potential VCC to the circuit of the semiconductorintegrated circuit device chip. The wiring 140-PAD transmits a signaloutputted from the transistor N1 or P1 of the output buffer 21 to theoutput terminal PAD.

The wiring 140-GND is connected to the source of the source/draindiffusion layer 118 of the transistor NFET via a contact hole or plug142 formed in the first-layered interlayer insulating film 126 and thesecond-layered interlayer insulating film 138 and is also connected tothe gate electrode 124-NFET of the transistor NFET via a contact hole orplug 144 formed in the first-layered interlayer insulating film 126 andthe second-layered interlayer insulating film 138. The potential of thegate electrode 124-NFET of the transistor NFET and the potential of thesource serve as a ground potential GND when power is supplied, and isturned OFF. When power is supplied, the transistor NFET is turned OFF.As a result, while in normal operation, the wiring 128-N is notconnected to the ground potential, and a malfunction of the integratedcircuit is restricted. Further, the wiring 140-GND is connected to thesource of the source/drain diffusion layer 114 of the transistor N1 viaa contact hole or plug 146 formed in the first-layered interlayerinsulating film 126 and the second-layered interlayer insulating film138.

The wiring 140-VCC is connected to the source of the source/draindiffusion layer 120 of the transistor PFET via a contact hole or plug148 formed in the first-layered interlayer insulating film 126 and thesecond-layered interlayer insulating film 138 and is also connected tothe gate electrode 124-PFET of the transistor PFET via a contact hole orplug 150 formed in the first-layered interlayer insulating film 126 andthe second-layered interlayer insulating film 138. The potential of thegate electrode 124-PFET of the transistor PFET and the potential of thesource serves as a power source potential VCC when power is supplied,and is turned OFF. When power is supplied, the transistor PFET is turnedOFF. As a result, while in normal operation, the wiring 128-P is notconnected to a ground potential, and a malfunction of the integratedcircuit is restricted. Further, the wiring 140-VCC is connected to thesource of the source/drain diffusion layer 116 of the transistor P1 viaa contact hole or plug 152 formed in the first-layered interlayerinsulating film 126 and the second-layered interlayer insulating film138.

The wiring 140-PAD is connected to the drain of the source/draindiffusion layer 114 of the transistor N1 via a contact hole or plug 154formed in the first-layered interlayer insulating film 126 and thesecond-layered interlayer insulating film 138 and is also connected tothe drain of the source/drain diffusion layer 114 of the transistor P1.A pad region 156 is provided between the contact holes or plugs 154, ofthe wiring 140-PAD. A portion of the pad region 156 is larger in widththan a portion other than the pad region 156, and is formed in a fringeshape.

A passivation film 158 formed of, for example, a silicon oxide film, asilicon nitride film, or an insulating polyimide film is formed on thesecond-layered interlayer insulating film 138 having the second layermetal 140 formed thereon. A drilled hole 160 is formed at a portion ofthe passivation film 158 positioned on the pad region 156, and the padregion 156 is exposed. A bonding pad or a solder ball electrode etc. isformed at the exposed portion, and functions as the output terminal PAD.

In the first layout example, the active region 108 is formed between thegate electrode 124-N1 of the transistor N1 and the output node (notshown) of the drive circuit 22, and the transistor NFET is formed in theactive region 108 (refer to FIG. 14 in particular). Further, the drainof the transistor NFET is connected to a portion of the wiring 128-N1between the output node of the drive circuit 22 and the contact hole orplug 132 (refer to FIG. 15 in particular). In this manner, the drain ofthe transistor NFET is connected between the output node of the drivecircuit 22 and the gate electrode 124-N1 of the transistor N1. Theallocation and structure of the transistor PFET are also similar tothose of the transistor NFET.

Therefore, according to the first layer example, as has been describedin the foregoing embodiment, in a state in which the chip 2 is notconnected to the grounding point GND and power source VCC, even in thecase where aerial discharge occurs with or from the chip 2, for example,each of the gate insulating film 122 of the transistor N1 and the gateinsulating film 122 of the transistor P1 can be protected from breakage.

(Second Layout Example)

FIG. 16 is a plan view showing a second layout example of thesemiconductor integrated circuit device according to the fourthembodiment of the present invention. FIG. 17 is a sectional view takenalong the line 17—17 in FIG. 16. FIG. 18 is a plan view showing a statein which a first-layered metal film and a second-layered metal film havebeen removed from the plan view shown in FIG. 16. FIG. 19 is a plan viewshowing a state in which the second-layered metal film has been removedsimilarly. In the second layout example, like elements in the firstlayout example are designated by like reference numerals. A descriptionof different elements will be given here.

The second layout example is particularly different from the firstlayout example in that the transistor NFET is formed in the activeregion 106 in which the transistor N1 is formed, and the transistor PFETis formed in the active region 110 in which the transistor P1 is formed.

Further, in the second layout example, the source of the source/draindiffusion layer 118 of the transistor NFET is shared with the source ofthe transistor N1, and the source of the source/drain diffusion layer120 of the transistor PFET is shared with the source of the transistorP1. The shared source/drain diffusion layers are designated by referencenumerals 114/118 and 116/120, respectively.

Moreover, the drain of the source/drain diffusion layer 118 of thetransistor NFET is connected to the contact hole or plug 132 via thecontact hole or plug 130 and wiring 128-N. In the first layout example,the contact hole or plug 130 is formed at a portion of the wiring 128-Nbetween the output node (not shown) of the drive circuit 22 and thecontact hole or plug 132. However, in the second layer example, thecontact hole or plug 132 reaching the electrode gate 124-N1 may beformed at a portion of the wiring 128-N between the output node (notshown) of the drive circuit 22 and the contact hole or plug 130 reachingthe drain of the transistor NFET. Similarly, the contact hole or plug136 reaching the electrode gate 124-P1 may be formed at a portion of thewiring 128-P between the output node (not shown) of the drive circuit 22and the contact hole or plug 134 reaching the drain of the transistorPFET.

In the second layout example, the transistors NFET and PFET are formedin the active regions 106 and 110, respectively (refer to FIG. 18 inparticular). Further, the drain of the transistor NFET is connected tothe contact hole or plug 130 via the contact hole or plug 130 and thewiring 128-N1 (refer to FIG. 19 in particular). In this manner, thedrain of the transistor NFET is connected to the gate electrode 124-N1of the transistor N1. Similarly, the drain of the transistor PFET isconnected to the contact hole or plug 136 via the contact hole or plug134 and wiring 128-P. In this manner, the drain of the transistor PFETis connected to the gate electrode 124-P1 of the transistor P1.

Therefore, according to the second layout example, as in the firstlayout example, in a state in which the chip 2 is not connected to thegrounding point GND and power source VCC, even in the case where aerialdischarge occurs with or from the chip 2, for example, each of the gateinsulating film 122 of the transistor N1 and the gate insulating film122 of the transistor P1 can be protected from breakage.

According to the second layout example, the transistors NFET and PFETare formed in the active regions 106 and 110, respectively, and thus,the active regions 108 and 112 can be deleted as compared with the firstlayout example. That is, according to the second layout example, theactive regions 108 and 112 are eliminated, whereby there can be attainedan advantage that an increase in chip area caused by newly providing thetransistors NFET and PFET can be restricted.

In addition, according to the second layout example, the source of thetransistors NFET and PFET is shared with the source of the transistorsN1 and P1, and thus, an increase in areas of the active regions 106 and110 can be restricted.

(Third Layout Example)

FIG. 20 is a plan view showing a third layout example of thesemiconductor integrated circuit device according to the fourthembodiment of the present invention. FIG. 21 is a plan view showing astate in which the second-layered metal film has been removed from theplan view shown in FIG. 20. In the third layout example, like elementsin the second layout example are designated by like reference numerals.A description of different elements will be given here.

The third layout example is particularly different from the secondlayout example in that a plurality of transistors NFET and PFET areprovided. In this example, the transistor NFET includes two transistorsNFET1 and NFET2, and also the transistor PFET includes two transistorsPFET1 and PFET2.

The transistors NFET1 and NFET2 are connected in parallel between thecommon output node of the transistors N2 and P2 of the drive circuit 22(output node of the drive circuit 22) and the ground line GND. A gateelectrode 124-NFET1 of the transistor NFET1 is connected to the wiring140-GND (ground line GND), and similarly, a gate electrode 124-NFET2 ofthe transistor NFET2 is connected to the wiring 140-GND (ground lineGND). The drain of the source/drain diffusion layer 118 of thetransistors NFET1 and NFET2 is shared. A gate width (channel width) ofthe transistor NFET1 and a gate width (channel width) of the transistorNFET2 are set to “WG” (refer to FIG. 21).

The transistors PFET1 and PFET2 are connected in parallel between thecommon output node of the transistors N3 and P3 of the drive circuit 22(output node of the drive circuit 22) and the power source line VCC. Agate electrode 124-PFET1 of the transistor PFET1 is connected to thewiring 140-VCC (power source line VCC), and similarly, a gate electrode124-PFET2 of the transistor PFET2 is connected to the wiring 140-VCC(power source line VCC). The drain of the source/drain diffusion layer120 of the transistors PFET1 and PFET2 is shared. A gate width (channelwidth) of the transistor PFET1 and a gate width (channel width) of thetransistor PFET2 both are set to “WG” (refer to FIG. 21).

The transistors N1 and P1 also include a plurality of transistors, forexample, two transistors, respectively, and the layout pattern isidentical to those of the first and second layout examples. However, inthe third layout example, conventionally, a description will be given indetail, assuming that the transistor N1 includes two transistors N11 andN12, and the transistor P1 includes two transistors P11 and P12similarly. Gate widths (channel widths) of the transistors N11, N12,P11, and P12 are all set to WG. In this example, the transistors N11,N12, NFET1, and NFET2 are allocated in the active region 106 to bearranged in an arrayed shape. The transistors P11, P12, PFET1, and PFET2are allocated in the active region 110 to be arranged in the arrayedshape.

FIG. 22 is an equivalent circuit diagram showing an equivalent circuitof the third layout example.

As shown in FIG. 22, when the third layout example is shown by theequivalent circuit, a common source diffusion layer 114/118 between thetransistors N11 and NFET1 is connected to the ground line 140-GND; thesource diffusion layer 114 of the transistor N12 is connected to theground line 140-GND; and the source diffusion layer 118 of thetransistor NFET2 is connected to the grounding line 140-GND.

Similarly, a common source diffusion layer 116/120 between thetransistors P11 and PFET1 is connected to the power source line 140-VCC;the source diffusion layer 116 of the transistor P12 is connected to thepower source line 140-VCC; and the source diffusion layer 120 of thetransistor PFET2 is connected to the power source line 140-VCC.

Here, it may be considered that the source diffusion layer 114 of thetransistor N12 and the source diffusion layer 118 of the transistorNFET2 are “always connected” to the ground line 140-GND. However, thesource diffusion layers 114 and 118 can be considered to be “arbitrarilyconnected” to the ground line 140-GND. Similarly, it can be consideredthat the source diffusion layer 116 of the transistor P12 and the sourcediffusion layer 120 of the transistor PFET2 are “arbitrary connected” tothe power source line 140-VCC. By making “arbitrary connection”, thetransistor N1 can be selected as a case in which the transistor N1 hasone transistor N11 or a case in which the transistor has two transistorsN11 and N12 as required. With respect to the transistor NFET as well, acase of one transistor N11 and a case of two transistors N11 and N12 canbe selected as required. With respect to the transistor P1 as well, acase of one transistor P11 and a case of two transistors P11 and P12 canbe selected as required. Also with respect to the transistor PFET, acase of one transistor PFET1 and a case of two transistors PFET1 andPFET2 can be selected as required. As a result, it becomes possible toadjust the current driving capabilities of the transistors N1 and P1 ofthe output buffer 21 and to adjust the short-circuit capability(hereinafter, referred to as a protection capability) of a short-circuitelement causing short-circuit between a substrate and a gate, forexample, of the transistors NFET and PFET.

The protection capability and current driving capability are adjusted inorder to respond to a request for flexibly coping the equipmentaccording to the present embodiment to a variety of electronic products.

A mass electric power generated with the “aerial discharge” which israised as a problem in the present invention varies depending on thesize of a charge quantity to be charged/accumulated in an electroniccard, for example. If the accumulated charge quantity is large, theelectric power generated in “aerial discharge” is likely to increase.The accumulated charge quantity would change variously depending on thesize of an electronic card or a material for the electronic card, etc.Namely, the accumulated charge quantity differs depending on electronicproducts. In order to cope with a deviation in this accumulated chargequantity, it must be possible to adjust the protection capabilities ofthe transistors NFET and PFET.

The adjustment of the protection capability in this example is madeaccording to an increase or decrease in the number of the transistorsNFET and PFET. Simply, each of the transistors NFET and PFET isincreased to a plurality with respect to an electronic product requiringhigh protection capability. In this example, the number of thesetransistors may be increased to two. With respect to an electronicproduct which does not require high protection capability, the number oftransistors included in the transistors N1 and P1 may be reduced to one,for example.

Similarly, the current driving capability required for the output buffer21 varies depending on each electronic product. Each of the transistorsN1 and P1 is increased to a plurality, for example, two transistors,with respect to an electronic product requiring high protectioncapability. With respect to an electronic product which does not requirehigh protection capability, the number of transistors included in thetransistors N1 and P1 may be reduced to one, for example.

In an example when “arbitrary connection” is made, the source diffusionlayers 114 and 118 may be connectable” to the ground line 140-GND, andthe source diffusion layers 116 and 120 may be “connectable” to thepower source line 140-VCC. As an example of “connectable”, in thisexample, as shown in FIG. 22, fuses F1, F2, F3, and F4 are allocatedbetween the source diffusion layer 114 and the ground line 140-GND;between the source diffusion layer 118 and the ground line 140-GND; thesource diffusion layer 116 and the power source line 140-VCC; andbetween the source diffusion layers 120, respectively.

The word “fuse” used in the present specification is defined not only asa fuse for mechanically breaking electrical connection by using a laseror a mass current, but also as being including all of those forstructurally disconnecting an electrical connection by not forming atleast one of wiring and contact, and for restoring a state in whichelectrical connection is shorted to an electrically connected state anda technique capable of determining/changing an electricallyconnected/disconnected state other than those fuses.

FIG. 23 is a view showing a relationship between a state ofconnection/disconnection, and a protection capability and a currentdriving capability, of the fuses F1, F2, F3, and F4. The protectioncapability and current driving capability are indicated as the size ofthe gate width (channel width) WG.

As shown in FIG. 23, in this example, 16 combinations (4²=16) can beobtained for combinations of the protection capability and the currentdriving capability.

In this example, although up to two transistors of each of thetransistors N1, P1, NFET, and PFET can be “arbitrarily connected”, thenumber of transistors is arbitrary without being limited to such up totwo transistors. For example, in the case where an attempt is made toincrease the number of transistors included in the transistor N1,patterns of the transistors N11 and N12 shown in FIGS. 20 and 21 may berepeated. In the same way, in the case where an attempt is made toincrease the number of transistors included in the transistor NFET,patterns of the transistors NFET1 and NFET2 may be repeated. The numberof transistors P1 and PFET can also be increased in the same manner asin the case of the transistors N1 and NFET.

Now, some examples of making transistors electricallydisconnected/connected will be described here. In this description,although there is shown an example of making the transistor NFET2electrically disconnected/connected, i.e., an example of making the fuseF3 disconnected/connected, the following examples can be applied to thefuses F1, F2, and F3.

(First Example)

FIG. 24 is a plan view showing a first example of disconnection.

As shown in FIG. 24, the first example is provided as an example inwhich a portion to be connected to the source diffusion layer 118 of thetransistor NFET2, of the ground line 140-VCC and the contact hole orplug 146 for connecting the ground line 140-VCC to the source diffusionlayer 118 are structurally eliminated. In the layout pattern shown inFIG. 24, the source diffusion layer 118 of the transistor NFET2 is notconnected to the ground line 140-VCC, and thus, the transistor NFET2 canbe electrically disconnected.

In the first example, whether the transistor NFET2 is made electricallyconnected or electrically disconnected may be achieved merely byreplacing a contact hole forming photo mask and a second-layered metalpatterning photo mask.

(Second Example)

FIG. 25 is a plan view showing a second example of disconnection.

As shown in FIG. 25, the second example is provided as an example inwhich a portion connected to the source diffusion layer 118 of thetransistor NFET2, of the ground line 140-VCC, is structurallyeliminated. The contact hole or plug 146 for connecting the ground line140-VCC to the source diffusion layer 118 exists. In this structure aswell, the transistor NFET2 can be made electrically disconnected.

In the second example, whether the transistor NFET2 is made electricallyconnected or electrically disconnected may be achieved merely byreplacing only the second-layered metal patterning photo mask, forexample. An advantage of the second example is that at least one photomask to be replaced is reduced in number, as compared with the firstexample.

(Third Example)

FIG. 26 is a plan view showing a third example of disconnection.

As shown in FIG. 26, the third example is provided as an example inwhich the contact hole or plug 146 for connecting the ground line140-VCC to the source diffusion layer 118 is structurally eliminated. Apattern of the ground line 140-VCC is identical to a case of connectingthe transistor NFET2. In this structure as well, the transistor NFET2can be made electrically disconnected.

In the third example, whether the transistor NFET2 is made electricallyconnected or electrically disconnected may be achieved by replacing onlythe contact hole forming photo mask which penetrates the first-layeredinterlayer insulating film 126 and the second-layered interlayerinsulating film 128, for example. An advantage of the third example isthat at least one photo mask to be replaced is reduced in number, ascompared with the first example.

(Fourth Example)

FIG. 27 is a plan view showing a fourth example of disconnection.

As shown in FIG. 27, the fourth example is provided as an example inwhich a portion of the ground line 140-VCC to be connected to the sourcediffusion layer 118 of the transistor NFET2 (hereinafter, referred to asa local ground line 140-VCC′) is mechanically broken while maintainingthe same structure as that in the case of connecting the transistorNFET2. To break the local ground line 140-VCC′, there may be used alaser, focusing ion beam or the like which is used in a fuse blowingprocess of the semiconductor integrated circuit device. This makes itpossible to electrically disconnect the transistor NFET2.

In the fourth example, there is no need to replace a semiconductorproduction photo mask. The local ground line 140-VCC′ may be broken atthe final stage in the fuse blowing process or wafer process. This is anadvantages of the fourth example.

(Fifth Example)

FIG. 28 is a plan view showing a fifth example of disconnection.

As shown in FIG. 28, the fifth example is provided as an example inwhich the ground line 140-VCC and a portion of the ground line 140-VCCto be connected to the source diffusion layer 118 of the transistorNFET2 (hereinafter, referred to as a local ground line 140-VCC′) arestructurally isolated from each other. A final structure is very similarto that of the fourth example. A difference between these examples isdescribed below. In the fourth example, the local ground line 140-VCC′is separated from the ground line 140-VCC by mechanically breaking theground line 140-VCC′. In contrast, in the fifth example, the localground line 140-VCC′ is formed in a state isolated from the ground line140-VCC by using, for example, the second-layered metal patterning photomask.

In the fifth example, as in the second example, the transistor NFET2 canbe made electrically disconnected merely by replacing only thesecond-layered metal patterning photo mask.

Further, in the fifth example, the following use is possible.

An equipment completion state is provided as a state in which the localground line 140-VCC′ is isolated from the ground line 140-VCC. Theisolated state is equivalent to the completion state. Thus, when theprotection capability is adjusted, the local ground line 140-VCC′ may beconnected to the ground line 140-VCC. Namely, in the fifth example, thelocal ground line 140-VCC′ can be used as a state in which it can beconnected to the ground line 140-VCC.

When the local ground line 140-VCC′ is connected to the ground line140-VCC, for example, as shown in FIG. 29, another electricallyconductive layer 200 is formed for an isolated portion, and electricalconnection may be recovered.

An advantage of an example of recovering electrical connection is that,even if the protection capability is judged to be insufficient aftercompletion, equipment can be saved without discarding it. In the casewhere the driving capabilities of the transistors N1 and P1 areinsufficient as well, the equipment can be saved similarly.

Moreover, this example of recovering electrical connection can be usedas the fourth example as well as the fifth example. An advantage in thecase of being used as the fourth example is that, even if the localground line 140-VCC′ is mistakenly broken, the mistakenly brokenequipment can be saved. Also when the transistors N1 and P1 aremistakenly broken, they can be saved similarly.

The first to fifth examples can be applied by variously combining themwith each other.

(Fourth Layout Example)

FIG. 30 is a view showing a basic layout of the third layout example, ofthe semiconductor integrated circuit device according to the fourthembodiment of the present invention. FIG. 31 is a view showing a basiclayout of a fourth layout example, of the semiconductor integratedcircuit device according to the fourth embodiment of the presentinvention.

As shown in FIG. 30, in the third layout example, the basic layout isthat the transistors N11, N12, NFET1, NFET2, P11, P12, PFET1, and PFET2of the gate width (channel width) WG, namely, a plurality oftransistors, are arranged in an arrayed shape along the gate lengthdirection.

In contrast, in the fourth layout example, as shown in FIG. 31, thebasic layout is that the transistors N11, N12, NFET1, NFET2, P11, P12,PFET1, and PFET2 are arranged in the arrayed shape along the gate lengthdirection, and that these transistors are isolated in plurality alongthe gate width direction. In the fourth layout example, the transistorN1 includes four transistors N111, N112, N121, and N122. Hereinafter,similarly, the transistor NFET includes four transistors NFET11, NFET12,NFET21, and NFET22, the transistor P1 includes four transistors P111,P112, P121, and P122, and the transistor PFET includes four transistorsRFET11, PFET12, PFET21, and PFET22. The gate widths (channel widths) ofthese 16 transistors are set to “WG/2” respectively.

In the fourth layout example, the basic layout is that the transistorsN111, N112, N121, N122, NFET11, NFET12, NFET21, NFET22, P111, P112,P121, P122, PFET11, PFET12, PFET21, and PFET22 of the gate width(channel width) WG/2, namely, a plurality of transistors, are arrangedin a matrix shape along the gate length direction and the gate widthdirection crossing the gate length direction.

FIG. 32 is a plan view showing the fourth layout example of thesemiconductor integrated circuit device according to the fourthembodiment of the present invention. FIG. 33 is a plan view showing astate in which the second-layered metal film has been removed from theplan view shown in FIG. 32. A difference between the fourth layoutexample and the third layout example is as described above. In FIGS. 32and 33, like elements in FIGS. 20 and 21 are designated by likereference numerals. A description of these elements is omitted here.

FIG. 34 is an equivalent circuit diagram showing an equivalent circuitof the fourth layout example.

As shown in FIG. 34, when the fourth layout example is shown by theequivalent circuit, a common source diffusion layer 114/118 between thetransistor N111 and the NFET11 is connected to the ground line 140-GND.The source diffusion layer 114 of the transistor N121 is connected tothe ground line 140-GND via a fuse F12. The source diffusion layer 118of the transistor NFET21 is connected to the ground line 140-GND via afuse F32. The common drain diffusion layer 118 between the transistorsNFET11 and HFET21 is connected to the wiring 128-N to which a signaloutputted from the transistor N2 or P2 is transmitted. The common draindiffusion layer 114 between the transistors N111 and N121 is connectedto the wiring 140-PAD to be connected to a pad.

A common source diffusion layer 114/118 between the transistor N112 andthe NFET12 is connected to the grinding wiring 140-GND via the fuse F12.The source diffusion layer 1118 of the transistor NFET22 is connected tothe ground line 140-GND via the fuse F32. The source diffusion layer 118of the transistor NFET22 is connected to the ground line 140-GND via thefuse F32. The common drain diffusion layer 118 between the transistorsFNET12 and NFET22 is connected to the wiring 128-N via a fuse F31. Thecommon drain diffusion layer 114 between the transistors N112 and N122is connected to the wiring 140-PAD via a fuse F11.

For connection of the transistors P111, P121, P112, P122, PFET11,PFET12, PFET21, and PFET22, it is substantially sufficient if the groundline 140-GND be reread as the power source line 140-VCC, the wiring128-N be reread as the wiring 1280P. A description of these transistorsis omitted here with reference to the accompanying drawings.

FIG. 35 is a view showing a relationship between a state ofconnection/disconnection and a protection capability and a currentdriving capability, of the fuses, F11, F12, F21, F22, F31, F32, F41, andF42. The protection capability and current driving capability areindicated as the size of the gate width (channel width) WG.

In this example, 64 combinations can be obtained as combinations of theprotection capability and current driving capability (8²=64). In FIG.35, only essential 16 combinations are shown.

An advantage achieved by this example is that the protection capabilitycan be adjusted more finely as compared with that of the third layoutexample. For example, although the minimum unit of adjustment of theprotection capability is set to “WG” in the third layout example, theminimum unit of adjustment is reduced to “WG/2” in the fourth layoutexample. Reference is made to columns of fuses F41 and F42 in FIG. 35and the columns of PFET of the protection capability. The protectioncapability of PFET can be adjusted in four steps of 2 WG, 1.5 WG, and0.5 WG in accordance with a combination of connection (0)/disconnection(1).

In this example, although “2” is set in the gate width direction and “2”is set in the gate length direction per transistor N1 or P1 ortransistor NFET or PFET, i.e., although a matrix of 2 columns×2 rows isdefined, the number of columns and the number of rows each are notlimited to “2”. For example, in the case where “4” is set in the gatewidth direction, the minimum unit of adjustment is set to “WG/4”, sothat the adjustment precision is enhanced. In the case where an attemptis made to enhance the adjustment precision, the number of transistorsarranged along the gate width direction may be increased. Further, inthe case where “4” is set in the gate length direction, the maximumprotection capability is set to “4 WG”, so that the adjustable range isexpanded. In the case where an attempt is made to expand the adjustablerange, the number of transistors arranged along the gate lengthdirection may be increased. These settings may be combined as required.

A matter common to the third and fourth layout examples is thatadjustment of the protection capability and adjustment of the currentdriving capability may be achieved at the same time, or alternatively,adjustment of only the protection capability and adjustment of only thecurrent driving capability may be achieved.

Now, some examples of making the transistors electricallydisconnected/connected will be described here. In this description,although there is shown an example of making the transistor NFET22electrically disconnected, i.e., making the fuse F31disconnected/connected, the following examples can be applied to thefuses F11, F12, F21, F22, F31, F32, F41, and F42.

(First Example)

FIG. 36 is a plan view showing a first example of disconnection.

In the example shown in FIG. 36, the first example shown in FIG. 24 isapplied to the device according to the fourth embodiment. In FIG. 36,like elements in FIG. 24 are designated by like reference numerals. Adescription of these elements is omitted here.

(Second Example)

FIG. 36 is a plan view showing a second example of disconnection.

In the example shown in FIG. 36, the second example shown in FIG. 25 isapplied to the device according to the fourth embodiment. In FIG. 37,like elements in FIG. 25 are designated by like reference numerals.

(Third Example)

FIG. 38 is a plan view showing a third example of disconnection.

In the example shown in FIG. 38, the third example shown in FIG. 26 isapplied to the device according to the fourth embodiment. In FIG. 38,like elements in FIG. 26 are designated by like reference numerals. Adescription of these elements is omitted here.

(Fourth Example)

FIG. 39 is a plan view showing a fourth example of disconnection.

In the example shown in FIG. 39, the first example shown in FIG. 27 isapplied to the device according to the fourth embodiment. In FIG. 39,like elements in FIG. 27 are designated by like reference numerals. Adescription of these elements is omitted here.

(Fifth Example)

FIG. 40 is a plan view showing a fifth example of disconnection. FIG. 41is a plan view showing an example of connection.

The examples shown in FIGS. 40 and 41 show that the fourth examplesshown in FIGS. 28 and 29 are applied to the device according to thefourth embodiment. In FIGS. 40 and 41, like elements in FIGS. 28 and 29are designated by like reference numerals. A description of theseelements is omitted here.

In the third and fourth layout examples, the gate width WG is adjusted.The method of adjusting the gate width is not limited to the onespecified above. The gate length may be adjusted. The gate length may beadjusted, in addition to the gate width WG.

The number of the wiring layers provided is not limited to those adoptedin the first to fourth layout examples.

(Test Example)

Next, a test example for the electronic card which reproduces theunexpected situation shown in FIGS. 1A, 1B, 2A, and 2B is explained.

FIG. 42A is a perspective view showing an example of a charging test inwhich the electronic card and/or chip is charged.

As shown in FIG. 42A, a conducting plate 12 is placed on an insulator 11and the electronic card 1 is placed on the conducting plate 12. Theconducting plate 12 is grounded. A power source 13 is connected to acondenser 14 via a relay 15 to charge the condenser 14. The power source13 supplies a voltage of several ten kV, for example, 15 kV. Thecondenser 14 has a capacitance of several hundred pF, for example, 100pF. After completion of charging, the condenser 14 is connected to oneend of a resistor 16 via the relay 15. The resistor 16 has a resistanceof several kΩ, for example, 1.5 kΩ and the other end thereof isconnected to a needle 17. The needle 17 is set closer to the electroniccard 1. When a distance between the needle 17 and the electronic card 1becomes a certain distance, an aerial discharge occurs between theneedle 17 and the electronic card 1 to charge the electronic card 1and/or the chip in the card. Thus, an unexpected situation shown inFIGS. 1A and 1B is reproduced.

FIG. 42B is a perspective view showing a discharging test in which theelectronic card and/or chip is discharged.

As shown in FIG. 42B, for example, the electronic card 1 charged in thetest of FIG. 42A is placed on the insulator 11. At this time, thegrounded needle 17 is set closer to the electronic card 1. When adistance between the needle 17 and the electronic card 1 becomes acertain distance, an aerial discharge occurs between the needle 17 andthe electronic card 1 to discharge the electronic card 1 and/or the chipin the card. Thus, an unexpected situation shown in FIGS. 2A and 2B isreproduced.

In the present charging test example and discharging test example, anexample in which the needle 17 is set closer to the electronic card 1 isshown. However, the tests were made not only for the external terminal 3but also for the side surface, front surface and rear surface of theelectronic card 1 as shown by circles of broken lines in FIGS. 42A and42B. This is because it is impossible to predict positions of theelectronic card 1 in which an aerial discharge occurs in the market.

In each of the above tests, the electronic card 1 containing thesemiconductor integrated circuit device according to the first to fourthembodiments was not destroyed and was correctly operated.

Thus, the semiconductor integrated circuit device according to the firstto fourth embodiments and the electronic card containing thesemiconductor integrated circuit device have an advantage that theintegrated circuit can be protected from destruction even when theintegrated circuit is connected to neither the ground node nor the powersource.

(Application Example 1)

Of course, the semiconductor integrated circuit device according to thefirst to fourth embodiments can be incorporated into an electronicproduct. However, it is particularly preferable to incorporate thesemiconductor integrated circuit device into an electronic card.Generally, a person carries the electronic card. Therefore, thepossibility that the electronic card meets with the above-unexpectedsituation is strong.

A memory card is provided as one example of the electronic card. Thememory card has a nonvolatile semiconductor memory device as a mainmemory section. As an example of the nonvolatile semiconductor memorydevice, a NAND type flash memory and AND type flash memory can be given.The output circuit explained in the first to fourth embodiments can beused as an output circuit of the NAND type flash memory and AND typeflash memory. One example of the NAND type flash memory is shown inFIGS. 43A and 43B.

FIG. 43A is a block diagram showing one example of a NAND type EEPROMand FIG. 43B is a circuit diagram showing one example of a memory cellarray of a NAND type EEPROM.

The output circuit explained in the first to fourth embodiments can beused as an output circuit connected to I/O pins (I/O1 to I/O8) shown inFIG. 43A, for example.

In some of the memory cards, not only a nonvolatile semiconductor memorydevice used as a main memory section but also a memory controller whichcontrols the nonvolatile semiconductor memory device is contained. Theoutput circuit explained in the first to fourth embodiments can be usedas an output circuit connected to I/O pins of the memory controller.

Now, specific examples of a memory card will be described here.

(First Example of Memory Card)

FIG. 44 is a block diagram depicting a first example of the memory card.

As shown in FIG. 44, the memory car according to the first example hasonly a nonvolatile semiconductor memory device 300. A pad PAD of thenonvolatile semiconductor memory device is connected to a card terminal302. An output circuit 304 with a protection function described in thefirst to fourth embodiments is connected to the PAD connected to thecard terminal 302, of the nonvolatile semiconductor memory device 300.

(Second Example of Memory Card)

FIG. 45 is a block diagram depicting a second example of the memorycard.

As shown in FIG. 45, the memory card according to the second example hasa nonvolatile semiconductor memory device 300 and a controller 306. Apad PAD of the nonvolatile semiconductor memory device 300 is connectedto a PAD of the controller 306. For example, another pad PAD of thecontroller 306 is connected to PAD connected to a card terminal 302, ofthe controller 306.

(Third Example of Memory Card)

FIG. 46 is a block diagram depicting a third example of the memory card.

As shown in FIG. 46, the memory card according to the third example hasa nonvolatile semiconductor memory device 300 and a controller 306, asin the second example. The third example is different from the secondexample in that the output circuit 304 with a protection function isconnected to the PAD connected to the controller 306, of the nonvolatilesemiconductor memory device 300 as well. The nonvolatile semiconductormemory device 300 and controller 306 are connected to wirings on acircuit board 308, and are provided as one system. The wirings of thecircuit board 308 include, for example, a power source wiring VCC and aground wiring GND, and the nonvolatile semiconductor memory device 300and controller 306 are electrically connected to each other via thepower source wiring VCC and ground wiring GND. If an aerial dischargeoccurs with the card terminal 302, a mass current flows the outputcircuit 304 of the controller 306. This mass current flows asemiconductor substrate or a well, and thus, there is a possibility thatsuch mass current reaches the semiconductor substrate or well of thenonvolatile semiconductor memory device 300 via the power source wiringVCC or ground wiring GND. Concerning an unexpected circumstance, as inthe third example, it would be better to provide the output circuit 304with a protection function at the nonvolatile semiconductor memorydevice 300 even in a system in which the nonvolatile semiconductormemory device 300 is not directly connected to the card terminal 302.

In the second and third examples, although the controller 306 is shown,the controller 306 may be replaced with an interface circuit forelectrically connecting the nonvolatile semiconductor memory device 300to an electronic product. In addition, all the systems may be integratedin one semiconductor integrated circuit device chip.

(Fourth Example of Memory Card)

In the first to third examples of the memory card, the memory card issystematically classified. In the following example, the memory card isstructurally classified.

FIG. 47 is an exploded sectional view showing a fourth example of thememory card.

As shown in FIG. 47, the memory card according to the fourth example isprovided as an example in which a nonvolatile semiconductor memorypackage or nonvolatile semiconductor memory module package 314 isdirectly pasted on a bottom of a package mount hole 312 provided on acard base 310. A semiconductor integrated circuit device chip 316 ishoused in the package 314. The chip 316 is provided as the nonvolatilesemiconductor memory device 300 described in the first to third examplesor the controller described in the second and third examples. That is,the chip 316 is provided as the semiconductor integrated circuit devicedescribed in the first to fourth embodiments.

The semiconductor integrated circuit device according to the first tofourth embodiments can be used for a memory card with a structure inwhich the package 314 is directly pasted on the bottom of the mount hole312.

(Fifth Example of Memory Card)

FIG. 48 is an exploded sectional view showing a fifth example of thememory card.

As shown in FIG. 48, the memory card according to the fifth example isprovided as an example in which a fringe 320 formed at the periphery ofthe package 314 is pasted on an adhesive portion 318 formed in a steppedshape at the periphery of a package mount hole 312 provided in a cardbase 310. A chip 316 in the package 314 is provided as the semiconductorintegrated circuit device described in the first to fourth embodiments.

The semiconductor integrated circuit device according to the first tofourth embodiments can be used for a memory card with a structure inwhich the fringe 320 of the package 314 is pasted on the adhesiveportion 318 formed at the periphery of the mount hole 312.

(Sixth Example of Memory Card)

FIG. 49 is an exploded sectional view showing a sixth example of thememory card.

As shown in FIG. 49, the memory card according to the sixth example isprovided as an example in which a package 314 is connected to a circuitboard 308, the circuit board 308 is adhered to a card base 310, and thecircuit board 308 is electrically connected to a card terminal 302provided on the card base 310 by using a bonding wire 322. Further, acover 324 is adhered to the card base 310 to shield the package 314 fromthe outside. A chip 316 in the package 314 is provided as thesemiconductor integrated circuit device described in the first to fourthembodiments.

The semiconductor integrated circuit device described in the first tofourth embodiments can be used for a memory card with a structure inwhich the package 314 is shielded from the outside.

Application Example 2

In an application example 2, some examples of an application utilizingthe electronic card according to the embodiment of this invention areexplained.

FIG. 50 is a perspective view showing an example of an electronicequipment utilizing an IC card according to one embodiment of thepresent invention. In FIG. 50, as one example of the electronicequipment, a portable electronic equipment, for example, a digital stillcamera is shown. The IC card according to the embodiment is a memorycard, for example, and is used as a recording medium of the digitalstill camera, for example.

As shown in FIG. 50, a card slot 72 and a circuit board connected to thecard slot 72 are received into a case of a digital still camera 71. Thecircuit board is omitted in FIG. 50 for simplicity. A memory card 70 isremovably mounted on the card slot 72 of the digital still camera 71.When mounted on the card slot 72, the memory card 70 is electricallyconnected to an electronic circuit on the circuit board.

FIG. 51 is a block diagram showing a basic system of the digital stillcamera.

Light from a subject is converged by a lens 73 and input to an imagepickup device 74. The image pickup device 74 photo electrically convertsinput light and outputs an analog signal, for example. One example ofthe image pickup device 74 is a CMOS image sensor. The analog signal isamplified by an analog amplifier (AMP.) and then converted into adigital signal by an analog-to-digital converter (A/D). The digitalsignal is input to a camera signal processing circuit 75 and is thensubjected to an automatic exposure control process (AE), automatic whitebalance control process (AWB) and color separation process, for example.After this, it is converted into a luminance signal and color differencesignal.

When an image is monitored, a signal output from the camera signalprocessing circuit 75 is input to a video signal processing circuit 76and converted into a video signal. As a system of the video signal, forexample, an NTSC (National Television System Committee) system can begiven. The video signal is output to a display section 78 mounted on thedigital still camera 71 via a display signal processing circuit 77. Oneexample of the display section 78 is a liquid crystal monitor. Further,the video signal is output to a video output terminal 80 via a videodriver 79. An image photographed by use of the digital still camera 71can be output to an image display device such as a television or adisplay of a personal computer via the video output terminal 80. Thus,it is possible to take pleasure in looking at the photographed imagedisplayed on a screen other than the display section 78. The imagepickup device 74, analog amplifier (AMP.), analog-to-digital converter(A/D) and camera signal processing circuit 75 are controlled by amicrocomputer 81.

When an image is captured, an operation button, for example, a shutterbutton 82 is depressed. Then, the microcomputer 81 controls a memorycontroller 83 to cause a signal output from the camera signal processingcircuit 75 to be written into a video memory 84 as a frame image. Theframe image written into the video memory 84 is compressed based on apreset compression format by a compression/expansion processing circuit85. Then, the compressed image is recorded on the memory card 70 mountedon the card slot 72 via a card interface 86.

When a recorded image is reproduced, an image recorded on the memorycard 70 is read out via the card interface 86, expanded by thecompression/expansion processing circuit 85 and written into the videomemory 84. The thus written image is input to the video signalprocessing circuit 76 and displayed on the display section 78 or imagedisplay device in the same manner as in a case wherein the image ismonitored.

In the example of the basic system, an example in which the card slot72, image pickup device 74, analog amplifier (AMP.), analog-to-digitalconverter (A/D), camera signal processing circuit 75, video signalprocessing circuit 76, display signal processing circuit 77, videodriver 79, microcomputer 81, memory controller 83, video memory 84,compression/expansion processing circuit 85 and card interface 86 aremounted on a circuit board 89 is shown. It is not necessary to mount thecard slot 72 on the circuit board 89 and it is possible to connect thecard slot to the circuit board 89 via a connector cable or the like.Further, in this example, a power source circuit 87 is mounted on thecircuit board 89. The power source circuit 87 receives power sourcevoltage from an external power source or battery and generates internalvoltage used in the internal portion of the digital still camera 71. Oneexample of the power source circuit 87 is a DC—DC converter. Theinternal power source voltage is supplied to each circuit as operationpower source voltage and additionally supplied as power source voltagesof a strobe 88 and display section 78.

Thus, the IC card according to the embodiment of this invention can beutilized for the portable electronic equipment such as the digital stillcamera.

The IC card according to the embodiment of this invention can beutilized for the digital still camera. Further, as shown in FIGS. 52A to52F, and FIGS. 53A to 53F, for example, it can be used for a videocamera (FIG. 52A), television (FIG. 52B), audio/visual equipment (FIG.52C), audio equipment (FIG. 52D), game equipment (FIG. 52E), electronicmusical instrument (FIG. 52F), portable telephone (FIG. 53A), personalcomputer (FIG. 53B), personal digital assistant (PDA, FIG. 53C), voicerecorder (FIG. 53D), PC card (FIG. 53E), electronic book terminal (FIG.53F) and the like.

Further, for example, the electronic card 1 can be roughly divided intoa contact type electronic card having an external terminal 3 and anon-contact type electronic card having no external terminal 3. Thesemiconductor integrated circuit device according to the first to fourthembodiments can be incorporated into any one of the contact typeelectronic card and non-contact type electronic card. In this case, itis predicted that the aerial discharge is a phenomenon which tends tooccur in the contact type electronic card. This is because the externalterminal 3 which is a conductor is exposed from the card surface in thecontact type electronic card. As is explained in the item of “TestExample”, it is impossible to completely predict the position of theelectronic card in which the aerial discharge occurs in the market.However, there is a strong possibility that the aerial discharge moreeasily occurs with respect to the external terminal 3 which is aconductor than with respect to the card external casing which isgenerally an insulator. The external terminal 3 is connected to theoutput terminal PAD of the chip 2. Therefore, when the aerial dischargeoccurs with respect to the external terminal 3, an unexpected situationoccurs as explained in the item of “Embodiment”. As a result, theadvantage in the above embodiment can be effectively attained in thecontact type electronic card.

Further, the possibility that the aerial discharge occurs in the contacttype electronic card will depend on the ratio of the area of theexternal terminal 3 to the card size. If the area of the externalterminal 3 occupying the card size is large, a large portion of theconductor is exposed from the card surface and the possibility ofoccurrence of the aerial discharge becomes strong. For example, in someof the electronic cards 1, the ratio of the area of the externalterminal 3 to the card size exceeds 25% (for example, refer to theperspective views of FIGS. 42A and 42B). Thus, in the electronic card 1in which the ratio of the area of the external terminal 3 to the cardsize exceeds 25%, the advantage in the above embodiments can be moreeffectively attained.

Of course, application of the semiconductor integrated circuit deviceaccording to the first to fourth embodiments is not limited to a contacttype electronic card and a contact type electronic card in which theratio of the area of the external terminal 3 to the card size exceeds25%. Further, the semiconductor integrated circuit device can also beused for a non-contact type electronic card and a contact typeelectronic card in which the ratio of the area of the external terminal3 to the card size is equal to or less than 25%. This is because itcannot be asserted that no unexpected situation occurs in the abovecards. Therefore, even when the semiconductor integrated circuit deviceaccording to the first to fourth embodiments is applied to a non-contacttype electronic card and a contact type electronic card in which theratio of the area of the external terminal 3 to the card size is equalto or less than 25%, the advantage in the above embodiment can beattained.

As described above, the present invention is explained with reference tothe first to fourth embodiments, but the present invention is notlimited to the embodiments. When embodying the invention, the presentinvention can be variously modified without departing from the technicalscope thereof.

The above embodiments can be independently performed, but it is ofcourse possible to adequately combine them and perform the combinedembodiments.

Each of the above embodiments contains inventions of various stages andthe inventions of various stages can be extracted by adequatelycombining a plurality of constituents disclosed in each of theembodiments.

As explained above, according to the embodiments of this invention, itis possible to provide the semiconductor integrated circuit device andthe electronic card using the semiconductor integrated circuit devicewhich can protect the integrated circuit from destruction in a state inwhich the integrated circuit is connected neither to the ground node northe power source.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

1. An electronic card comprising: a card terminal which is exposed on asurface of a card; a semiconductor integrated circuit chip including anoutput terminal connected to the card terminal and an output circuitconnected to the output terminal, the output circuit including an outputbuffer including a first insulated-gate field effect transistorconnected to the output terminal, and a drive circuit including a secondinsulated-gate field effect transistor connected to the gate of thefirst insulated-gate field effect transistor; and a protection circuitprovided in the semiconductor integrated circuit chip and between theoutput buffer and the drive circuit, the protection circuit configuredto protect the first insulated-gate field effect transistor fromdestruction against a pulse having a pulse width of 1 ns or less appliedto the card terminal, the protection circuit including a thirdinsulated-gate field effect transistor connected between a sourceterminal of the first insulated-gate field effect transistor and thegate of the first insulated-gate field effect transistor, the thirdinsulated-gate field effect transistor formed in an active region inwhich the first insulated-gate field effect transistor is formed.
 2. Theelectronic card according to claim 1, wherein the semiconductorintegrated circuit chip includes a nonvolatile semiconductor memorydevice and the output circuit which is an output circuit of thenonvolatile semiconductor memory device.
 3. The electronic cardaccording to claim 2, wherein the nonvolatile semiconductor memorydevice is a flash memory.
 4. The electronic card according to claim 3,wherein the flash memory is a NAND type flash memory.
 5. The electroniccard according to claim 1, wherein the semiconductor integrated circuitchip includes a memory controller and the output circuit which is anoutput circuit of the memory controller.
 6. The electronic cardaccording to claim 5, further comprising a nonvolatile semiconductormemory device and the memory controller which controls the nonvolatilesemiconductor memory device.
 7. The electronic card according to claim6, wherein the nonvolatile semiconductor memory device includes a flashmemory.
 8. The electronic card according to claim 7, wherein the flashmemory is a NAND type flash memory.
 9. The electronic card according toclaim 1, wherein the semiconductor integrated circuit chip includes aninterface circuit and the output circuit which is an output circuit ofthe interface circuit.
 10. The electronic card according to claim 9,further comprising a nonvolatile semiconductor memory device and theinterface circuit for connecting the nonvolatile semiconductor memorydevice to an electronic product.
 11. The electronic card according toclaim 10, wherein the nonvolatile semiconductor memory device chipincludes a flash memory.
 12. The electronic card according to claim 11,wherein the flash memory is a NAND type flash memory.
 13. An electroniccard comprising: a card terminal which is exposed on a surface of acard; and a semiconductor integrated circuit chip including an outputterminal connected to the card terminal and an integrated circuit devicehaving an output circuit connected to the output terminal, the outputcircuit including an output buffer which drives the output terminal, adrive circuit which drives the output buffer, and a protection circuitprovided between the output buffer and the drive circuit, the protectioncircuit protecting the output buffer, the output buffer including afirst insulated-gate field effect transistor connected to the outputterminal, the protection circuit including a second insulated-gate fieldeffect transistor connected between a source terminal of the firstinsulated-gate field effect transistor and the gate of the firstinsulated-gate field effect transistor, the second insulated-gate fieldeffect transistor formed in an active region in which the firstinsulated-gate field effect transistor is formed.
 14. The electroniccard according to claim 13, wherein the integrated circuit deviceincludes a nonvolatile semiconductor memory device.
 15. The electroniccard according to claim 13, wherein the integrated circuit deviceincludes a memory controller.
 16. The electronic card according to claim13, wherein the integrated circuit device includes an interface circuit.